Symposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology" (2001 Boston, Mass.)

Subjects

Biotechnology, Biotechnology -- Congresses, Congresses, Integrated circuits, Integrated circuits -- Ultra large scale integration -- Congresses, Integrated circuits, very large scale integration, Materials, Microlithography, Microlithography -- Congresses, Nanostructures, Nanostructures -- Congresses, Nanotechnology, Nanotechnology -- Congresses, Ultra large scale integration