| Born | 1942 |
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| Born | 1942 |
Subjects
Microlithography, Etching, Industrial applications, Lasers, Semiconductors, Congresses, Design and construction, Information display systems, Integrated circuits, Optical instruments, PhotolithographyID Numbers
- OLID: OL1604580A
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| September 1, 2008 | Edited by RenameBot | fix author name |
| April 1, 2008 | Created by an anonymous user | initial import |