An edition of Selected papers on resolution enhancement techniques in optical lithography (2004)

Selected papers on resolution enhancement techniques in optical lithography

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Cover of: Selected papers on resolution enhancement techniques in optical lithography by F. M. Schellenberg, F. M. Schellenberg
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February 21, 2022 | History
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An edition of Selected papers on resolution enhancement techniques in optical lithography (2004)

Selected papers on resolution enhancement techniques in optical lithography

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Publish Date
Publisher
SPIE Press
Language
English
Pages
875

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Previews available in: English

Subjects

Integrated circuits, Design and construction, Microlithography, Photolithography, Semiconductors, Etching
Edition Availability
Cover of: Selected papers on resolution enhancement techniques in optical lithography
Selected papers on resolution enhancement techniques in optical lithography
2004, SPIE Press
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
SPIE milestone series -- v. MS 178
Other Titles
Resolution enhancement techniques in optical lithography

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .S4147 2004, TK7874

The Physical Object

Pagination
xx, 875 p.
Number of pages
875

Edition Identifiers

Open Library
OL31597167M
Internet Archive
selectedpaperson0000unse_i8s3
ISBN 10
0819451665
LCCN
2004041639

Work Identifiers

Work ID
OL23886838W

Source records

Library of Congress MARC record
Better World Books record
Internet Archive item record
Promise Item

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February 21, 2022 Edited by ImportBot import existing book
December 8, 2020 Created by MARC Bot import new book