Characterization in compound semiconductor processing
by G. E. McGuire
Characterization in Compound Semiconductor Processing is for scientists and engineers working with compound semiconductor materials and devices who are not characterization specialists. Materials and processes typically used in R&D and in the fabrication of GaAs, GaAlAs, InP and HgCdTe based devices provide examples of common analytical problems.
The book discusses a variety of characterization techniques to provide insight into how each individually, or in combination, might be used in solving problems associated with these materials. The book will help in the selection and application of the appropriate analytical techniques by its coverage of all stages of materials or device processing: substrate preparation, epitaxial growth, dielectric film deposition, contact formation and dopant introduction.
Check nearby libraries
Buy this book
Subjects
Surfaces, Compound semiconductors| Edition | Availability |
|---|---|
1
Characterization in compound semiconductor processing
1995, Butterworth-Heinemann, Manning
in English
0750692669 9780750692663
|
aaaa
|
Book Details
Edition Notes
Includes bibliographical references and index.
Classifications
The Physical Object
Edition Identifiers
Work Identifiers
Community Reviews (0)
Lists
History
- Created April 1, 2008
- 6 revisions
Wikipedia citation
×CloseCopy and paste this code into your Wikipedia page. Need help?
| July 16, 2024 | Edited by MARC Bot | import existing book |
| November 18, 2020 | Edited by MARC Bot | import existing book |
| April 9, 2019 | Edited by MARC Bot | import existing book |
| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |