An edition of Microlithography and metrology in micromachining (1995)

Microlithography and metrology in micromachining

23-24 October, 1995, Austin, Texas

by

Cover of: Microlithography and metrology in micromachining by Michael T. Postek
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Last edited by MARC Bot
July 18, 2024 | History
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An edition of Microlithography and metrology in micromachining (1995)

Microlithography and metrology in micromachining

23-24 October, 1995, Austin, Texas

by

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Publish Date
Publisher
SPIE
Language
English
Pages
246

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Previews available in: English

Subjects

Micromachining, Mensuration, Congresses, Microlithography, Measurement, Micromechanics
Edition Availability
Cover of: Microlithography and metrology in micromachining
Microlithography and metrology in micromachining: 23-24 October, 1995, Austin, Texas
1995, SPIE
in English

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Book Details

Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 2640, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 2640.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TJ1191.5 .M525 1995, TJ1191.5.M525 1995

The Physical Object

Pagination
ix, 246 p. :
Number of pages
246

Edition Identifiers

Open Library
OL819459M
Internet Archive
isbn_0819420069_2640
ISBN 10
0819420069
LCCN
95070375
OCLC/WorldCat
33310898
Goodreads
3438354

Work Identifiers

Work ID
OL18329345W

Source records

Scriblio MARC record
Library of Congress MARC record
Better World Books record
Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
July 18, 2024 Edited by MARC Bot import existing book
February 13, 2019 Edited by MARC Bot import existing book
February 5, 2019 Created by MARC Bot import existing book