Reduced Thermal Processing for ULSI

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Last edited by MARC Bot
November 9, 2020 | History

Reduced Thermal Processing for ULSI

1 edition

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Publish Date
Publisher
Springer
Language
English
Pages
450

Buy this book

Edition Availability
Cover of: Reduced Thermal Processing for ULSI
Reduced Thermal Processing for ULSI
January 31, 1990, Springer
Hardcover in English - 1 edition
Cover of: Reduced thermal processing for ULSI
Reduced thermal processing for ULSI
1989, Plenum Press
in English

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Book Details


Edition Notes

NATO Science Series: B:

Classifications

Library of Congress
TK7871.85 .R43 1989

The Physical Object

Format
Hardcover
Number of pages
450

Edition Identifiers

Open Library
OL10324218M
ISBN 10
0306433826
ISBN 13
9780306433825
LCCN
89023011
Goodreads
3954410

Work Identifiers

Work ID
OL8360356W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 9, 2020 Edited by MARC Bot import existing book
February 18, 2019 Edited by MARC Bot import existing book
January 2, 2011 Edited by AMillarBot move edition notes from title to notes field (NATO Science Series: B:)
April 24, 2010 Edited by Open Library Bot Fixed duplicate goodreads IDs.
April 30, 2008 Created by an anonymous user Imported from amazon.com record