An edition of Reduced Thermal Processing for ULSI
(1989)
Reduced thermal processing for ULSI
by R.A. Levy
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1
Reduced Thermal Processing for ULSI
January 31, 1990, Springer
Hardcover
in English
- 1 edition
0306433826 9780306433825
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Book Details
Edition Notes
Includes bibliographical references.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso.
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- Created April 1, 2008
- 4 revisions
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| July 30, 2019 | Edited by MARC Bot | associate edition with work OL8360356W |
| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| April 13, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |