An edition of Optical Laser Microlithography VIII (1995)

Optical Laser Microlithography VIII

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Cover of: Optical Laser Microlithography VIII by Brunner, Brunner
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Last edited by MARC Bot
July 18, 2024 | History
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An edition of Optical Laser Microlithography VIII (1995)

Optical Laser Microlithography VIII

by

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Publish Date
Publisher
Society of Photo Optical
Language
English
Pages
948

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Previews available in: English

Subjects

Computer simulation, Congresses, Photoresists, Masks (Electronics), Microlithography, Lenses, Design and construction
Edition Availability
Cover of: Optical Laser Microlithography VIII
Optical Laser Microlithography VIII
June 1995, Society of Photo Optical
Paperback in English
Cover of: Optical/laser microlithography VIII
Optical/laser microlithography VIII: 22-24 February 1995, Santa Clara, California
1995, SPIE
in English

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Book Details

The Physical Object

Format
Paperback
Number of pages
948
Dimensions
11.2 x 8.8 x 2 inches
Weight
5 pounds

Edition Identifiers

Open Library
OL11392955M
Internet Archive
isbn_0819417882_2440
ISBN 10
0819417882
ISBN 13
9780819417886
LCCN
94069903
OCLC/WorldCat
32689495

Work Identifiers

Work ID
OL9256486W

Source records

Western Washington University MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 18, 2024 Edited by MARC Bot import existing book
July 31, 2023 Edited by ImportBot import existing book
February 7, 2019 Edited by MARC Bot import existing book
December 15, 2009 Edited by WorkBot link works
April 30, 2008 Created by an anonymous user Imported from amazon.com record