An edition of Optical Laser Microlithography VIII (1995)

Optical/laser microlithography VIII

22-24 February 1995, Santa Clara, California

by

Optical/laser microlithography VIII
Brunner
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Last edited by MARC Bot
July 31, 2019 | History
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An edition of Optical Laser Microlithography VIII (1995)

Optical/laser microlithography VIII

22-24 February 1995, Santa Clara, California

by

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Publish Date
Publisher
SPIE
Language
English
Pages
948

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Previews available in: English

Subjects

Computer simulation, Congresses, Photoresists, Masks (Electronics), Microlithography, Lenses, Design and construction
Edition Availability
Cover of: Optical Laser Microlithography VIII
Optical Laser Microlithography VIII
June 1995, Society of Photo Optical
Paperback in English
Cover of: Optical/laser microlithography VIII
Optical/laser microlithography VIII: 22-24 February 1995, Santa Clara, California
1995, SPIE
in English

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash
Series
Proceedings / SPIE--the International Society for Optical Engineering -- v. 2440, Proceedings of SPIE--the International Society for Optical Engineering -- v. 2440.
Other Titles
Optical laser microlithography VIII, Optical/laser microlithography 8, Optical/laser microlithography eight

The Physical Object

Pagination
xii, 948 p. :
Number of pages
948

Edition Identifiers

Open Library
OL15376058M
ISBN 10
0819417882
LCCN
94069903
OCLC/WorldCat
32689495

Work Identifiers

Work ID
OL9256486W

Source records

Western Washington University MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9256486W
April 27, 2009 Edited by ImportBot add OCLC number
September 19, 2008 Created by ImportBot Imported from Western Washington University MARC record