Check nearby libraries
Buy this book

This work doesn't have a description yet. Can you add one?
Check nearby libraries
Buy this book

Edition | Availability |
---|---|
1
Reduced Thermal Processing for ULSI
January 31, 1990, Springer
Hardcover
in English
- 1 edition
0306433826 9780306433825
|
zzzz
|
2 |
aaaa
|
Book Details
Edition Notes
Includes bibliographical references.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso.
Classifications
The Physical Object
Edition Identifiers
Work Identifiers
Community Reviews (0)
February 18, 2019 | Edited by MARC Bot | import existing book |
January 2, 2011 | Edited by AMillarBot | move edition notes from title to notes field (NATO Science Series: B:) |
April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
December 10, 2009 | Created by WorkBot | add works page |