Reduced thermal processing for ULSI

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Last edited by MARC Bot
February 18, 2019 | History

Reduced thermal processing for ULSI

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Publish Date
Publisher
Plenum Press
Language
English
Pages
438

Buy this book

Edition Availability
Cover of: Reduced Thermal Processing for ULSI
Reduced Thermal Processing for ULSI
January 31, 1990, Springer
Hardcover in English - 1 edition
Cover of: Reduced thermal processing for ULSI
Reduced thermal processing for ULSI
1989, Plenum Press
in English

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Book Details


Edition Notes

Includes bibliographical references.
"Published in cooperation with NATO Scientific Affairs Division."
"Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI, held June 20-July 1, 1988, in Boca Raton, Florida"--T.p. verso.

Published in
New York
Series
NATO ASI series. Series B, Physics ;, vol. 207, NATO ASI series., v. 207.

Classifications

Dewey Decimal Class
621.39/5
Library of Congress
TK7871.85 .R43 1989

The Physical Object

Pagination
xi, 438 p. :
Number of pages
438

Edition Identifiers

Open Library
OL2201343M
ISBN 10
0306433826
LCCN
89023011
Goodreads
3954410

Work Identifiers

Work ID
OL8360356W

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History

Download catalog record: RDF / JSON
February 18, 2019 Edited by MARC Bot import existing book
January 2, 2011 Edited by AMillarBot move edition notes from title to notes field (NATO Science Series: B:)
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page