An edition of Optical Laser Microlithography VIII (1995)

Optical Laser Microlithography VIII

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Cover of: Optical Laser Microlithography VIII by Brunner, Brunner
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Last edited by ImportBot
July 31, 2023 | History
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An edition of Optical Laser Microlithography VIII (1995)

Optical Laser Microlithography VIII

by

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Publish Date
Publisher
Society of Photo Optical
Language
English
Pages
948

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Previews available in: English

Subjects

Computer simulation, Congresses, Photoresists, Masks (Electronics), Microlithography, Lenses, Design and construction
Edition Availability
Cover of: Optical/laser microlithography VIII
Optical/laser microlithography VIII: 22-24 February 1995, Santa Clara, California
1995, SPIE
in English
Cover of: Optical Laser Microlithography VIII
Optical Laser Microlithography VIII
June 1995, Society of Photo Optical
Paperback in English

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Book Details

The Physical Object

Format
Paperback
Number of pages
948
Dimensions
11.2 x 8.8 x 2 inches
Weight
5 pounds

Edition Identifiers

Open Library
OL11392955M
Internet Archive
isbn_0819417882_2440
ISBN 10
0819417882
ISBN 13
9780819417886
LCCN
94069903
OCLC/WorldCat
32689495

Work Identifiers

Work ID
OL9256486W

Source records

Western Washington University MARC record
Internet Archive item record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
July 31, 2023 Edited by ImportBot import existing book
February 7, 2019 Edited by MARC Bot import existing book
December 11, 2009 Created by WorkBot add works page